Light emitting diodes including modifications for submount bonding

ABSTRACT

Light emitting diodes include a substrate, an epitaxial region on the substrate that includes therein a diode region and a multilayer conductive stack on the epitaxial region opposite the substrate. A passivation layer extends at least partially on the multilayer conductive stack opposite the epitaxial region, to define a bonding region on the multilayer conductive stack opposite the epitaxial region. The passivation layer also extends across the multilayer conductive stack, across the epitaxial region and onto the substrate. The multilayer conductive stack can include an ohmic layer on the epitaxial region opposite the substrate, a reflector layer on the ohmic layer opposite the epitaxial region and a tin barrier layer on the reflector layer opposite the ohmic layer. An adhesion layer also may be provided on the tin barrier layer opposite the reflector layer. A bonding layer also may be provided on the adhesion layer opposite the tin barrier layer. A submount and a bond between the bonding layer and the submount also may be provided.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application claims the benefit of and priority from ProvisionalApplication Ser. No. 60/352,941, filed Jan. 30, 2002, entitled LED DieAttach Methods and Resulting Structures, Provisional Application Ser.No. 60/307,311, filed Jul. 23, 2001, entitled Flip Chip Bonding of LightEmitting Diodes, Provisional Application Ser. No. 60/307,234, filed Jul.23, 2001 entitled Thermosonic Bonding of Flip Chip Light-EmittingDiodes, and is a continuation-in-part (“CIP”) of application Ser. No.10/057,821, filed Jan. 25, 2002, entitled Light Emitting DiodesIncluding Modifications for Light Extraction and Manufacturing MethodsTherefor, the disclosures of all of which are hereby incorporated hereinby reference in their entirety as if set forth fully herein.

FIELD OF THE INVENTION

This invention relates to microelectronic devices and fabricationmethods therefor, and more particularly to light emitting devices, suchas light emitting diodes (LEDs) and manufacturing methods therefor.

BACKGROUND OF THE INVENTION

Light emitting diodes are widely used in consumer and commercialapplications. As is well known to those having skill in the art, a lightemitting diode generally includes a diode region on a microelectronicsubstrate. The microelectronic substrate may comprise, for example,gallium arsenide, gallium phosphide, alloys thereof, silicon carbideand/or sapphire. Continued developments in LEDs have resulted in highlyefficient and mechanically robust light sources that can cover thevisible spectrum and beyond. These attributes, coupled with thepotentially long service life of solid state devices, may enable avariety of new display applications, and may place LEDs in a position tocompete with the well entrenched incandescent and fluorescent lamps.

Gallium Nitride (GaN)-based LEDs typically comprise an insulating orsemiconducting substrate such as silicon carbide (SiC) or sapphire onwhich a plurality of GaN-based epitaxial layers are deposited. Theepitaxial layers comprise an active or diode region having a p-njunction which emits light when energized.

LEDs may be mounted substrate side down onto a submount, also called apackage or lead frame (hereinafter referred to as a “submount”). Incontrast, flip-chip mounting of light emitting diodes involves mountingthe LED onto the submount with the substrate side facing up (i.e. awayfrom the submount). Light may be extracted and emitted through thesubstrate. Flip chip mounting may be an especially desirable techniquefor mounting SiC-based LEDs. In particular, since SiC has a higher indexof refraction than GaN, light generated in the active or diode regiongenerally does not totally internally reflect (i.e. reflect back intothe GaN-based layers) at the GaN/SiC interface. Flip chip mounting ofSiC-based LEDs also can improve the effect of certain substrate-shapingtechniques known in the art. Flip chip packaging of SiC LEDs may haveother benefits, such as improved heat dissipation, which may bedesirable depending on the particular application for the LED.

Because of the high index of refraction of SiC, light passing through anSiC substrate tends to be totally internally reflected into thesubstrate at the surface of the substrate unless the light strikes thesurface at a fairly low angle of incidence (i.e. fairly close tonormal). The critical angle for total internal reflection generallydepends on the material with which SiC forms an interface. It ispossible to increase the light output from an SiC-based LED by shapingthe SiC substrate in a manner that limits total internal reflection bycausing more rays to strike the surface of the SiC at low angles ofincidence. A number of such shaping techniques and resulting devices aretaught in the above-cited U.S. patent application Ser. No. 10/057,821.

One potential problem with flip-chip mounting is that when an LED ismounted on a submount using conventional techniques, a conductive dieattach material such as silver epoxy is deposited on the LED and/or onthe package, and the LED and the submount are pressed together. This cancause the viscous conductive die attach material to squeeze out and makecontact with the N-type substrate and/or layers in the device, therebyforming a Schottky diode connection that can short-circuit the p-njunction in the active region.

Metal-metal bonds formed by soldering, thermosonic scrubbing and/orthermocompression bonding are alternative attach techniques. However,tin (Sn) is a component of most types of solder, and migration of Snfrom the bonded surface into the device can cause unwanted degradationof the device. Such migration can interfere with metal-semiconductorinterfaces such as ohmic contacts and/or the function of metal—metalinterfaces such as reflective interfaces that serve as mirrors.

SUMMARY OF THE INVENTION

Light emitting diodes according to some embodiments of the presentinvention include a substrate, an epitaxial region on the substrate thatincludes therein a diode region, and a multilayer conductive stackincluding a barrier layer on the epitaxial region opposite thesubstrate. A passivation layer extends at least partially on themultilayer conductive stack opposite the epitaxial region, to define abonding region on the multilayer conductive stack opposite the epitaxialregion. The passivation layer also extends across the multilayerconductive stack, across the epitaxial region and onto the substrate.

In some embodiments of the present invention, the passivation layer isnon-wettable to a bonding material that is used to attach the bondingregion to a submount. In other embodiments of the present invention, themultilayer conductive stack and the epitaxial region both include asidewall, and the passivation layer extends on the sidewalls of themultilayer conductive stack and the epitaxial region. In still otherembodiments of the present invention, a bonding layer is provided on thebonding region. In some embodiments of the present invention, thebonding layer includes a sidewall and the passivation layer also extendsonto the sidewall of the bonding layer. In yet other embodiments, thepassivation layer does not extend on the bonding layer sidewall. Instill other embodiments of the present invention, an adhesion layerand/or a solder wetting layer are provided between the multilayerconductive stack and the bonding layer. In yet other embodiments of thepresent invention, the adhesion layer includes an adhesion layersidewall and the passivation layer also extends on the adhesion layersidewall. In still other embodiments, the passivation layer does notextend on the adhesion layer sidewall.

In still other embodiments of the present invention, the substrateincludes a first face adjacent the epitaxial region and a second faceopposite the epitaxial region. In some embodiments of the presentinvention, the bonding layer has smaller surface area than themultilayer conductive stack, the multilayer conductive stack has smallersurface area than the epitaxial region and the epitaxial region hassmaller surface area than the first face. In other embodiments of thepresent invention, the second face also has smaller surface area thanthe first face.

Still other embodiments of the present invention include a submount anda bond between the bonding region and the submount. In some embodimentsof the present invention, the bond is a thermocompression bond. In otherembodiments of the present invention, the bond comprises solder.

Light emitting diodes according to other embodiments of the presentinvention include a substrate having first and second opposing faces,the second face having smaller surface area than the first face. Anepitaxial region is provided on the first face that includes therein adiode region. An ohmic layer is on the epitaxial region opposite thesubstrate. A reflector layer is on the ohmic layer opposite theepitaxial region. A barrier layer is on the reflector layer opposite theohmic layer. An adhesion layer is on the barrier layer opposite thereflector layer. A bonding layer is on the adhesion layer opposite thebarrier layer. In other embodiments, a solder wetting layer is on theadhesion layer opposite the barrier layer. Other embodiments of thepresent invention further comprise a submount and a bond between thebonding layer and the submount.

In some embodiments of the present invention, the ohmic layer comprisesplatinum, palladium, nickel/gold, nickel oxide/gold, nickeloxide/platinum, titanium and/or titanium/gold. In still otherembodiments of the present invention, the reflector layer comprisesaluminum and/or silver. In some embodiments of the present invention,the barrier layer comprises tungsten, titanium/tungsten and/or titaniumnitride/tungsten. In other embodiments of the present invention, thebarrier layer comprises a first layer comprising tungsten, and a secondlayer comprising nickel on the first layer. In some embodiments of thepresent invention, the solder has a reflow temperature of less thanabout 210° C., and the barrier layer comprises a layer oftitanium/tungsten that is between about 500 Å thick and about 50,000 Åthick. In other embodiments of the present invention, the solder has areflow temperature of more than about 210° C. and the barrier layercomprises a first layer of titanium/tungsten that is about 5000 Å thick,and a second layer comprising nickel that is about 2000 Å thick, on thefirst layer. In still other embodiments of the present invention, thesolder has a reflow temperature of more than about 250° C. and thebarrier layer comprises a first layer of titanium/tungsten that is about5000 Å thick and a second layer comprising nickel that is about 2000 Åthick, on the first layer.

In other embodiments of the present invention, the epitaxial region hassmaller surface area than the second face. The barrier layer, thereflector layer and the ohmic layer have same surface area which is lessthan that of the epitaxial region. The adhesion layer and the bondinglayer have same surface area that is smaller than that of the barrierlayer, the reflective layer and the ohmic layer. In still otherembodiments of the present invention, a passivation layer as wasdescribed above also may be provided.

Passivation layers according to some embodiments of the presentinvention provide means for preventing an external short circuit acrossthe epitaxial region. Moreover, a barrier layer comprising a tungsten,titanium/tungsten and/or titanium nitride/tungsten layer ortitanium/tungsten and nickel layers according to some embodiments of thepresent invention provide means for reducing migration of tin and/orother potentially deleterious materials into the multilayer conductivestack.

Light emitting diodes may be fabricated, according to some embodimentsof the present invention, by epitaxially forming a plurality of spacedapart mesa regions on a substrate, wherein the mesa regions includetherein a diode region. First reduced area regions are defined on themesa regions, for example using photolithography. A multilayerconductive stack that includes a barrier layer is formed on the firstreduced area regions of the mesa regions. A passivation layer is formedon the substrate between the mesa regions, on exposed portions of themesa regions and on exposed portions of the multilayer conductivestacks. The barrier layer defines second reduced area regions on themultilayer conductive stacks. A bonding layer is formed on the secondreduced area regions of the multilayer conductive stacks. The substrateis then diced between the mesas, to produce a plurality of lightemitting diodes. In other embodiments of the present invention, thedicing is followed by bonding the bonding layer to a submount. In someembodiments of the present invention, thermocompression bonding is used.In other embodiments of the present invention, solder bonding is used.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1-10 are cross-sectional views of light emitting diodes accordingto some embodiments of the present invention during intermediatefabrication steps according to some embodiments of the presentinvention.

FIGS. 11A-12D graphically illustrate test results for light emittingdiodes according to some embodiments of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT

The present invention now will be described more fully hereinafter withreference to the accompanying figures, in which embodiments of thepresent invention are shown. This invention may, however, be embodied inmany alternate forms and should not be construed as limited to theembodiments set forth herein.

Accordingly, while the present invention is susceptible to variousmodifications and alternative forms, specific embodiments thereof areshown by way of example in the drawings and will herein be described indetail. It should be understood, however, that there is no intent tolimit the present invention to the particular forms disclosed, but onthe contrary, the present invention is to cover all modifications,equivalents, and alternatives falling within the spirit and scope of thepresent invention as defined by the claims. Like numbers refer to likeelements throughout the description of the figures. In the figures, thedimensions of layers and regions may be exaggerated for clarity. It willalso be understood that when an element, such as a layer, region orsubstrate, is referred to as being “on” another element, it can bedirectly on the other element or intervening elements may also bepresent. In contrast, when an element, such as a layer, region orsubstrate, is referred to as being “directly on” another element, thereare no intervening elements present. Moreover, each embodiment describedand illustrated herein includes its complementary conductivity typeembodiment as well.

Embodiments of the present invention now will be described generallywith reference to gallium nitride-based light emitting diodes on siliconcarbide-based substrates. However, it will be understood by those havingskill in the art that many embodiments of the present invention mayemploy any combination of a substrate that is non-absorbing ortransparent to the emitted light and an index matched light emittingdiode epitaxial layer. In some embodiments of the present invention, therefractive index of the substrate is greater than that of the diode.Accordingly, combinations can include an AlGaInP diode on a GaPsubstrate; an InGaAs diode on a GaAs substrate; an AlGaAs diode on aGaAs substrate; an SiC diode on an SiC substrate, an SiC diode on asapphire (Al₂O₃) substrate; and/or a nitride-based diode on a galliumnitride, silicon carbide, aluminum nitride, zinc oxide and/or othersubstrate.

Some embodiments of the present invention provide a metal stack with apassivation layer on its perimeter that defines a bonding region on LEDdevices that can be well suited for die attachment via soldering and/orthermosonic scrub bonding. Other embodiments of the present inventionprovide LED devices that can be flip chip mounted using soldering and/orthermosonic bonding, and that include a barrier layer that can reduce oreliminate unwanted degradation of the metal and/or semiconductor layersof the LED. Still other embodiments of the present invention can provideboth the passivation layer and the barrier layer. Yet other embodimentsof the present invention provide methods of fabricating these LEDdevices. Passivation layers according to some embodiments of the presentinvention can provide means for preventing a short circuit across thediode region. Moreover, barrier layers according to some embodiments ofthe present invention can provide means for reducing migration of tinand/or other undesired materials into the LED.

In a conventional sapphire-based approach, an LED, also referred to as achip or die, is attached to a submount with a clear epoxy. In the caseof LEDs having conductive SiC substrates, a conducting silver filledepoxy is typically used to attach the LED and the submount to oneanother. Conventional nitride-based LEDs on SiC or sapphire substratesgenerally are packaged with the epitaxial side up and with the substratebonded to the submount.

Some embodiments of conventional SiC-based LEDs have an n-typeconductive substrate and an epitaxial region on the substrate thatincludes one or more n-type epitaxial layers and one or more p-typeepitaxial layers to define a diode region. A transparent ohmic contactmay be formed on the p-type epitaxial LED surface. As discussed in U.S.patent application Ser. No. 10/057,821, referenced above, it may bebeneficial to form a reflector layer over the thin transparent ohmiccontact to improve light extraction from the device. The reflectivelayer can serve to spread electric current uniformly across the thincontact, and also to reflect light back into the substrate, away fromthe submount.

Unfortunately, if Sn and/or other contaminants from a solder orthermosonic/thermocompression bond migrates from the bonding surface tothe reflector layer, the reflector layer may become less reflective.Moreover, if the contaminants migrate beyond the reflector to thetransparent ohmic contact, the transparent ohmic contact may develop ahigher specific contact resistivity, thus increasing the forward voltage(V_(F)) of the device. Both of these results may be characterized asdegradation of the device.

A reflective layer may comprise Ag and/or Al, and the thin transparentohmic layer can comprise Pt, Pd, Ni, Ti, Au or a combination of theseelements. Unfortunately, Sn readily forms alloys with Ag, Pt, Au andwith numerous other metals used in semiconductor manufacturing.

A first portion of a series of conductive layers (referred to herein asa “multilayer conductive stack”) that may be formed on the p-typesurface of an LED according to some embodiments of the present inventioncomprises an ohmic layer, a reflector layer, and a barrier layer. Insome embodiments, the barrier layer comprises a thin layer of titanium,titanium/tungsten (TiW) and/or titanium nitride/tungsten (TiNW). Inother embodiments, the barrier layer comprises a first layer oftitanium/tungsten and a second layer comprising nickel on the firstlayer.

In some embodiments of the present invention, this portion of themultilayer conductive stack and the top of the device are passivatedwith a passivation layer, such as an insulating layer to which a solderor eutectic die attach material will not wet. The passivation layer canbe formed by conventional spin-on or deposition techniques such asChemical Vapor Deposition (CVD) and/or reactive sputtering, and it cancomprise an insulating oxide and/or nitride such as silicon dioxideand/or silicon nitride.

In some embodiments of the present invention, an opening in thepassivation layer is then formed with lateral dimensions (i.e. surfacearea) that are smaller than the lateral dimensions of the barrier layersuch that only a portion of the surface of the barrier layer is exposed.Such an opening can be produced using conventional photolithography andetching techniques. An optional adhesion layer that may comprise Ti, isformed in the opening and a thick bonding layer that may comprise Au, Snand/or AuSn also is formed. In other embodiments, an optional solderwetting layer is provided between the adhesion layer and the bondinglayer. The solder wetting layer can provide an enhanced mechanicalconnection between the solder and the LED, which can increase the shearstrength of the connection.

In some embodiments of the present invention, the bonding layer canserve to protect the barrier layer if mechanical stress is to be appliedto the multilayer conductive stack by a probe tip during electricaltests. Furthermore, in other embodiments of the present invention, theAu in the bonding layer can serve to protect the barrier layer fromoxidation. In yet other embodiments of the present invention, AuSn maybe employed in the bonding layer as a eutectic die attach material thatmay be used to bond an LED and a submount to one another via thermosonicor thermocompression bonding as an alternative to solder bonding.

Multilayer conductive stacks according to some embodiments of thepresent invention can be well suited for solid state devices in thatsome embodiments of the present invention can provide a stack that isconsiderably thinner than may be achieved if a solder barrier is formedusing Ni or NiV. In some embodiments of the present invention, a barrierlayer comprising W, TiW and/or TiNW and/or W and Ni layers can be lessthan half of the thickness that may be used if only Ni were used as thebarrier layer. This may be advantageous when considering the generallysmall lateral dimensions of solid state devices and when considering thepotential difficulty associated with the use of conventional fabricationtechniques if large topographical dimensions are present. The barrierlayer also can provide a desired vertical barrier against Sn and/orother undesired migration.

Passivation layers according to some embodiments of the invention cancover the entire epitaxial surface of the LED except for a reduced areaopening that exposes the barrier layer, and can provide a dam to reduceor prevent Sn and/or other undesired migration into the reflectivemirror layer or the ohmic contact, or down the edges of the metal stack.In the case of an LED having a conducting substrate, passivation layersaccording to some embodiments of the invention also can serve to keepthe die attach material from contacting the substrate which couldproduce undesired effects such as formation of a parasitic Schottkydiode.

Large area LEDs operating at high power levels may use packaging thathas low thermal resistance to reduce or prevent degradation of thedevice performance. Epoxy based die attach materials may have highthermal resistance in comparison to metal die attach materials. In aflip-chip configuration, the p-n junction region of an LED is mountedextremely close to the heat sinking package, which can bypass thethermal resistance of the substrate. This may be used for large-areaSiC-based LEDs in some embodiments of the present invention, despite thelow thermal resistance of SiC. The metal—metal bond provided by someembodiments of the present invention also may be used in LEDs havingsapphire substrates, due to the high thermal resistance of sapphire.Consequently, some embodiments of the present invention may be used forlarge area LEDs, which may benefit from employing a junction down(flip-chip) metal—metal die attach configuration. Other embodiments ofthe present invention may be used with small-area LEDs.

Some embodiments of the present invention also may increase thepermissible temperature range that the device can withstand duringsubsequent packaging and assembly steps. Metal-metal bonds can beengineered for subsequent thermal cycles, for example, where the LED ismounted to a printed circuit board. If the LED die is attached to itssubmount with a AuSn thermosonic or thermocompression bond at 300° C. orby SnAg solder at 230° C., subsequent processing cycles using SnPbsolder at 200° C. may not cause mechanical failure by reflowing the dieattach bond. That is, subsequent processing at elevated temperatures maynot cause the LED die to detach from the submount. In contrast, LEDsusing epoxy based die attach methods may not withstand high thermalcycles. Moreover, clear epoxy can become discolored during thermalprocessing, resulting in unwanted light attenuation.

Some embodiments of the present invention may also increase the shearstrength of resulting bonds between the LED and the submount. Inclusionof a solder barrier layer which reduces or prevents tin and/or otherunwanted materials from reaching the epitaxial layers of the device canpreserve the adhesive strength of the metal-semiconductor interface andcan result in a more robust, mechanically stable device. In particular,it has been found that embodiments that include a nickel solder wettinglayer beneath a gold bonding layer may exhibit superior shear strength.

In addition, some embodiments of the present invention may improve thethermal conductivity of the resulting device. This effect may beparticularly apparent in so-called “power” or large area LEDs which maycarry a substantially higher current than conventional LEDs. In suchLEDs, some embodiments of the present invention can prevent or reduce“voiding” within the metallic layers. Voiding refers to the formation ofphysical voids or spaces within a metallic region. Some embodiments ofthe present invention may serve to maintain a tight grain structurewithin such metallic layers, thereby allowing the device to maintain ahigh thermal conductivity despite operation at high power levels withcorrespondingly high junction temperatures. Improved thermalconductivity also may help reduce degradation of encapsulant materialsin which LEDs, and in particular power LEDs, are packaged. Suchencapsulants are typically sensitive to heat and may yellow and becomeless transparent after expose to high temperatures for extended periodsof time. By improving the thermal conductivity of the LED mountinterface, less heat may be dissipated through the encapsulant, whichcan result in reduced degradation.

FIG. 1 illustrates an LED device precursor 10 according to someembodiments of the present invention, comprising a substrate 20 havingfirst and second opposing faces 20 a and 20 b, respectively, and anepitaxial region 22 formed on the first face 20 a of the substrate 20.Substrate 20 may comprise silicon carbide, sapphire, aluminum nitride,gallium nitride or any other suitable conductive or nonconductivesubstrate material. In some embodiments of the present invention, thesubstrate 20 comprises conductively doped SiC. In some embodiments ofthe present invention, the substrate 20 is transparent to opticalradiation in a predetermined wavelength range. In some embodiments ofthe present invention, epitaxial region 22 comprises a conductive bufferlayer and a plurality of Group III-nitride epitaxial layers, at leastsome of which provide a diode region. The dimensions of the substrate,epitaxial layers and metal layers shown in FIGS. 1-10 are not drawn toscale but are exaggerated for illustrative purposes. A thin SiO₂ and/orother layer (not shown) may optionally be formed, for example, by PlasmaEnhanced Chemical Vapor Deposition (PECVD) on the surface of theepitaxial region 22 to protect it during subsequent processing andcleaning steps.

Subsequent to deposition of the epitaxial region 22, the epitaxialregion 22 is patterned as shown in FIG. 2 to form a plurality of mesas30 each having sidewalls 30 a, 30 b. Although not illustrated in FIG. 2,the mesas 30 may extend into the substrate 20. Moreover, in someembodiments of the present invention, the mesas 30 may be formed byselective epitaxial growth through openings in a mask, rather thanblanket epitaxial growth and etching.

Still referring to FIG. 2, in some embodiments of the present invention,a layer of photoresist 24 and/or other material is formed on the surfaceof the precursor 10 and patterned to expose the surface of the mesas 30,thereby defining a first reduced area 30 c on the surface of the mesas30. If an optional SiO₂ layer is present, it may be etched through theopenings in the photoresist 24 to expose the first reduced area 30 c onthe epitaxial surface layer of the epitaxial region 22 in the mesa 30.

A multilayer conductive stack 35 is then formed on the first reducedareas 30 c of the mesas 30 using, for example, conventional lift-offtechniques. As shown in FIG. 3, the multilayer conductive stack 35includes an ohmic layer 32, a reflector layer 34 and a barrier layer 36.In some embodiments of the present invention, the ohmic layer 32comprises platinum, but in other embodiments it may comprise palladium,nickel/gold, nickel oxide/gold, nickel oxide/platinum, titanium and/ortitanium/gold. Other embodiments of ohmic layers are described in theabove-referenced application Ser. No. 10/057,821. If the ohmic layer 32comprises Pt, it is about 25 Å thick in some embodiments of the presentinvention. The reflector layer 34 may comprise any suitable reflectivemetal, and may comprise Al or Ag. The reflector layer 34 is about 1000 Åthick in some embodiments of the present invention. Other embodiments ofreflector layers are described in the above-referenced application Ser.No. 10/057,821.

In some embodiments of the present invention, the barrier layer 36 canbe a solder barrier layer to prevent solder metals such as tin fromreacting with the reflector layer 34 and/or ohmic layer 32. The barrierlayer 36 comprises W, TiW and/or TiN/W and is between about 500 Å andabout 50,000 Å thick in some embodiments of the present invention, andis about 5000 Å thick in other embodiments of the present invention. Inother embodiments of the invention, the barrier layer 36 may compriseTiW having a composition of about 5% Ti and about 95% W.

Other embodiments of the barrier layer 36 that comprise tungsten ortitanium/tungsten and that are between about 500 Å thick to about 3000 Åthick, may be used when a solder bonding operation (described below) isperformed at a reflow temperature of less than about 210° C. Forexample, when eutectic gold/lead/tin solders are used at reflowtemperatures of about 190° C. to about 210° C., a barrier layercomprising between about 500 Å and about 3000 Å of titanium/tungsten maybe used, according to some embodiments of the present invention.

In other embodiments of the present invention, higher reflowtemperatures may be used to accommodate other solders, such as solderscomprising tin, silver and antimony, that have a reflow temperature ofabout 220° C. to about 260° C. One example of these solders is a Kesterbrand R276AC silver-tin solder paste that is about 96.5% tin and about3.5% silver. Accordingly, in some embodiments of the present invention,the barrier layer 36 comprises a first layer of tungsten ortitanium/tungsten 36 a that is about 5000 Å thick, and a second layer 36b comprising nickel that is about 2000 Å thick, on the first layer, 36a. It has been found that some of these embodiments of the presentinvention can withstand temperatures of between about 325° and about350° C., for about five minutes, without substantially increasing theforward voltage (V_(F)) or reduce the light output of the LED. Thus, insome embodiments of the present invention, a multilayer barrier layer 36comprising a layer of tungsten or titanium/tungsten 36 a and a layer ofnickel 36 b is used with solders that have a reflow temperature of morethan about 200° C. In other embodiments of the present invention, thesemultilayer barrier layers may be used with solders that have a reflowtemperature of more than about 250° C.

In some embodiments of the present invention, tungsten, silver andplatinum are deposited, for example, using an e-beam technique. TiW maybe deposited using an e-beam technique, but in other embodiments of thepresent invention, Ti and W are simultaneously sputter deposited. Inaddition, the TiW may be sputter deposited in the presence of nitrogento form a TiN/TiW layer that also forms a barrier to Sn diffusion, inother embodiments of the present invention.

In yet other embodiments of the present invention, the barrier layer 36may consist essentially of nickel or NiV. In other embodiments of thepresent invention, the barrier layer 36 may comprise a 2500 Å nickelsolder barrier covered completely with a layer of gold between about 500Å and 1,000 Å thick. The gold layer can prevent the nickel layer fromoxidizing. However, the use of a nickel barrier layer may result inunacceptably high degradation of optical and electrical performance atelevated temperature and current levels due to tin migration. Moreover,thicker films of nickel may be difficult to use since the film stressmay be high. This may create concern with respect to delamination of thenickel from the adjacent reflective and/or ohmic layers. Moreover, thepresence of Au at the edges of the barrier layer may create a path forSn to migrate down and around the edges of the barrier.

Referring now to FIG. 4, in some embodiments of the present invention, apassivation layer 40 is deposited or otherwise formed on the first (orepitaxial-side) surface 20 a of device precursor 10. In some embodimentsof the present invention, passivation layer 40 may comprise SiO₂ and/orSiN (which may be deposited in stoichiometric or non-stoichiometricamounts) and may be deposited by conventional techniques such as PECVDand/or reactive sputtering. The passivation layer 40 is about 1500 Åthick in some embodiments of the present invention. As also shown inFIG. 4, this blanket deposition also forms the passivation layer on thesidewalls of the mesas 30 and the multilayer conductive stack 35, and onthe exposed surface of the barrier layer 36.

Referring now to FIG. 5, the passivation layer 40 is patterned with anetch mask (such as a photoresist) to provide a first patternedpassivation layer 40 a and to selectively reveal a second reduced areaportion 36 c of the surface of barrier layer 36. In other embodiments ofthe present invention, a lift off technique may be used to expose thesecond reduced area portion 36 c of the surface of the barrier layer 36.In still other embodiments of the present invention, selectivedeposition of the passivation layer 40 a may be used so that a separatepatterning step need not be used.

Still referring to FIG. 5, an optional adhesion layer 55 comprising, forexample, Ti is then deposited on the second reduced area 36 c of thebarrier layer 36 and a bonding layer 60 is deposited on the adhesionlayer 55. These depositions may be performed using the patternedpassivation layer 40 a as a mask and/or using lift-off techniques. Theadhesion layer 55 is about 1000 Å thick in some embodiments of thepresent invention. The bonding layer 60 may comprise Au, Sn and/or AuSnand is about 1000 Å thick in some embodiments. The bonding layer 60 maybe up to about 1 μm thick (if Au) or about 1.7 μm thick (if AuSn) insome embodiments of the present invention. However, in some embodiments,use of a layer of Au that is thicker than about 1000 Å may lead toinconsistent solder reflow processing or Au embrittlement of the solderattachment, which may result in low shear strength. As shown, thepatterned passivation layer 40 a also is on the sidewalls of theadhesion layer 55 and the bonding layer, according to some embodimentsof the present invention. In other embodiments, the patternedpassivation layer 40 a does not extend on the sidewalls of the adhesionlayer 55 and the bonding layer 60. In these embodiments, the passivationlayer may extend on the sidewalls of the conductive stack 35. Accordingto other embodiments of the present invention, the bonding layer 60extends away from the multilayer conductive stack 35, to beyond thepatterned passivation layer 40 a. In yet other embodiments, the bondinglayer 60 does not extend to beyond the outer surface of the patternedpassivation layer 40 a.

For devices formed on conductive substrates, ohmic contacts and a wirebond pad (not shown) are formed on the second substrate face 20 bopposite the epitaxial region to form a vertically-conductive device.Many such embodiments are described in application Ser. No. 10/057,821.For devices formed on non-conductive substrates, ohmic contacts andmetal bonding layers (not shown) may be formed on an n-type epitaxialregion of the device to form a horizontally-conductive device. Many suchembodiments also are shown in application Ser. No. 10/057,821.

Referring now to FIG. 6, the precursor 10 is diced into individual lightemitting diodes 100. FIG. 6 also shows that LEDs 100 may be sawed suchthat they have a beveled sidewall configuration 70 to increase lightextraction. Many other embodiments of substrate shaping are described inapplication Ser. No. 10/057,821.

Accordingly, FIG. 6 illustrates light emitting diodes 100 according tosome embodiments of the present invention that include a substrate 20,an epitaxial region (referred to previously as a mesa) 30 on thesubstrate 20 that includes therein a diode region, a multilayerconductive stack 35 on the epitaxial region 30 opposite the substrate20, and a passivation layer 40 b that extends at least partially on themultilayer conductive stack 35 opposite the epitaxial region 30, todefine a reduced area bonding region 36 c on the multilayer conductivestack 35 opposite the epitaxial region 30. In some embodiments, thepassivation layer 40 b also extends across the multilayer conductivestack 35, across the epitaxial region 30, and onto the first substrateface 20 a. As also shown in FIG. 6, in some embodiments of the presentinvention, the multilayer conductive stack 35 and the epitaxial region30 both include sidewalls, and the passivation layer 40 b extends on thesidewalls of the multilayer conductive stack 35 and of the epitaxialregion 30. As also shown in FIG. 6, a bonding layer 60 is provided onthe bonding region 36 c. The bonding layer 60 also includes a bondinglayer sidewall, and the passivation layer 40 b may or may not extendonto the bonding layer sidewall. Finally, an adhesion layer 55 may beprovided between the multilayer conductive stack 35 and the bondinglayer 60, and the passivation layer 40 b also may or may not extend ontothe sidewall of the adhesion layer 55 and/or the bonding layer 60.

Still referring to FIG. 6, in some embodiments of the present invention,the substrate 20 includes a first face 20 a adjacent the epitaxialregion 30 and a second face 20 b opposite the epitaxial region. Asillustrated in FIG. 6, the bonding layer 60 has smaller surface areathan the multilayer conductive stack 35 and the multilayer conductivestack 35 has smaller surface area than the epitaxial region 30. Theepitaxial region 30 has smaller surface area than the first face 20 a.The second face 20 b also has smaller surface area than the first face20 a.

FIG. 6 also illustrates light emitting diodes according to someembodiments of the invention that include a substrate 20 having firstand second opposing faces 20 a and 20 b, respectively, the second face20 b having smaller surface area than the first face. An epitaxialregion 30 is on the first face 20 a, and includes therein a dioderegion. An ohmic layer 32 is on the epitaxial region 30 opposite thesubstrate 20. A reflector layer 34 is on the ohmic layer 32 opposite theepitaxial region 30. A barrier layer 36 is on the reflector layer 34opposite the ohmic layer 32. An adhesion layer 55 is on the barrierlayer 36 opposite the reflector layer 34. Finally, a bonding layer 60 ison the adhesion layer 55 opposite the barrier layer 36.

As also shown in FIG. 6, in some embodiments of the present invention,the barrier layer 36 comprises tungsten, titanium/tungsten and/ortitanium nitride/tungsten. In other embodiments of the presentinvention, the tin barrier layer 36 comprises a first layer 36 acomprising tungsten and a second layer 36 b comprising nickel on thefirst layer 36 a comprising tungsten.

As also shown in FIG. 6, in some embodiments of the present invention,the epitaxial region 30 has smaller surface area than the first face 20a. The barrier layer 36, the reflector layer 34 and the ohmic layer 32have same surface area, that surface area being less than that of theepitaxial region 30. The adhesion layer 55 and the bonding layer 60 havesame surface area, that surface area being smaller than that of thebarrier layer 36, the reflector layer 34 and the ohmic layer 32.

Finally, as also shown in FIG. 6, in some embodiments of the invention,the epitaxial region 30, the ohmic layer 32, the reflector layer 34, thebarrier layer 36, the adhesion layer 55 and the bonding layer 60 eachinclude a sidewall and the light emitting diode 100 further includes apassivation layer 40 b on the sidewalls of the epitaxial region 30, theohmic layer 32, the reflector layer 34 and the barrier layer 36. Thepassivation layer also may or may not extend onto the sidewalls of theadhesion layer 55 and/or the bonding layer 60. The passivation layer 40b also may extend on the first face 20 a of the substrate 20.

FIG. 7 illustrates other embodiments of the present invention in whichthe bonding layer 60 comprises a solder wetting layer 62 and a wettingpassivation layer 64. In some embodiments, the solder wetting layer 62comprises nickel and is about 2000 Å thick. In some embodiments, thewetting passivation layer 64 comprises Au and is about 500 Å thick. Useof the nickel solder wetting layer 62 can provide an enhanced mechanicalbond to the solder, which can increase the shear strength of theconnection and can reduce the possibility of mechanical failure,according to some embodiments of the invention.

FIG. 8 illustrates other embodiments of the present invention in whichthe bonding layer 60 and optional adhesion layer 55 do not extend beyondthe outer edge 40 c of the passivation layer 40 b. This configurationmay be used when solder bonding is used to mount the LED to a leadframe, according to some embodiments of the invention.

FIGS. 1-8 also illustrate methods of fabricating a plurality of lightemitting diodes according to some embodiments of the present invention.These methods comprise epitaxially forming a plurality of spaced apartmesa regions 30 on a substrate 20, the mesa regions including therein adiode region (FIG. 2). A first reduced area region 30 c is defined onthe mesa regions (FIG. 2). A multilayer conductive stack 35 thatincludes a barrier layer, is formed on the first reduced area regions 30c of the mesa regions 30 (FIG. 3). A passivation layer 40 a is formed onthe substrate 20 between the mesa regions 30, on exposed portions of themesa regions and on exposed portions of the multilayer stack 35, thepassivation layer 40 a defining a second reduced area region 36 c on themultilayer conductive stack 35 (FIGS. 4 and 5). A bonding layer 60 thenis formed on the second reduced area regions 36 c of the multilayerconductive stacks 35 (FIG. 5). The substrate 20 is diced between themesas 30 to produce the plurality of light emitting diodes 100 (FIG. 6).

Referring now to FIGS. 9 and 10, once the LED 100 has been diced, theLED and a conductive submount 75 are attached to one another asillustrated in FIGS. 9 and 10. FIG. 9 illustrates embodiments of thepresent invention in which the LED 100 is mounted in a “flip-chip”configuration with the epitaxial side down, via thermosonic and/orthermocompression bonding. That is, instead of using an epoxy or asolder to form a mechanical connection or bond between the LED 100 andthe submount 75, the bonding layer 60 of LED 100 is thermosonically orthermocompressively bonded directly to the submount 75 as described, forexample, in U.S. Provisional Application Ser. No. 60/307,234.

In some embodiments of thermosonic or thermocompression bondingaccording to some embodiments of the present invention, the LED chip 100is placed into mechanical contact with the submount and subjected tomechanical and/or sonic stimulation at a temperature greater than theeutectic temperature of the bonding metal. The bonding metal thus formsa bond with the metallic submount, which provides an electromechanicalconnection between the LED and the submount. In embodiments of thepresent invention in which the bonding layer 60 has an Au/Sn relativecomposition of about 80%/20%, the temperature used for thermosonicbonding may be approximately 300° C.

The presence of the barrier layer 36 and/or the passivation layer 40 bcan reduce or prevent unwanted interaction between metals in the bondinglayer 60 with the reflective layer 34 and/or the ohmic layer 32. Thebarrier layer 36 and/or the passivation layer 40 may also serve toretard or inhibit unwanted migration of metal along the edge of themetal stack 35.

In other embodiments of the present invention, the LED 100 may bemounted on the submount 75 using a metal solder 80 such as SnAg, SnPband/or other solders as illustrated in FIG. 10. The passivation layer 40b can reduce or prevent Sn from solder 80 from migrating to (and therebypotentially degrading) the reflective layer 34 and/or ohmic layer 32.The passivation layer 40 b also can reduce or prevent conductive solder80 from contacting the substrate 20 and mesa sidewalls, which mayotherwise result in the formation of unwanted parasitic Schottkycontacts to n-type regions of the device 100. Other bonding techniquesthat may be used, according to other embodiments of the presentinvention, are disclosed in the above-cited Provisional Application Ser.No. 60/307,311.

TEST RESULTS

The following test results are illustrative and shall not be construedas limiting the scope of the present invention. FIGS. 11A-11Dgraphically illustrate test results for a 2500 Å Ni solder barrier whileFIGS. 12A-12D graphically illustrate results for a 5000 Å TiW barrier.

In a first test, the high temperature operating life (HTOL) of a numberof LED samples was measured. In this test, twenty LEDs were fabricatedwith TiW solder barriers 36, SiN passivation layers 40 b and goldbonding layers 60. Twenty LEDs also were fabricated with the samestructure except that they used an Ni solder barrier. The devices weremounted on silver-plated 5 mm radial lead frames via solder bonding. Thedevices were then operated at a forward current of 20 mA while beingmaintained at a temperature of 85° C. Optical output power and V_(F)were measured after 24, 168, 336, 504, 672, 864 and 1008 hours. As shownin FIGS. 11A and 12A, the devices with the Ni barrier exhibited largerdegradation in light output, compared to the devices with the TiWbarrier. Moreover, V_(F) increased more in the Ni barrier devices (FIG.1B) than in the TiW barrier devices (FIG. 12B).

In a second test, twenty LEDs were fabricated with TiW solder barriers36, SiN passivation layers 40 b and gold bonding layers 60, and twentyLEDs were fabricated with the same structure except that they used theNi barrier. The devices were mounted as described above in reference tothe HTOL tests and operated at a pulsed forward current of 70 mA (25%duty cycle at 4 kHz) for a period of 504 hours while being maintained ata temperature of 85° C. and a relative humidity of 85%. Optical outputpower and V_(F) were measured after 24, 168, 336, 504, 672, 864 and 1008hours. As shown in FIGS. 11C and 12C, larger degradation in light outputoccurred with the Ni barrier and, as shown in FIGS. 11D and 12D, alarger increase in V_(F) occurred with the Ni barrier.

In the drawings and specification, there have been disclosed typicalpreferred embodiments of the invention and, although specific terms areemployed, they are used in a generic and descriptive sense only and notfor purposes of limitation, the scope of the invention being set forthin the following claims.

What is claimed is:
 1. A light emitting device comprising: a substrate;an epitaxial rotation having an epitaxial region thickness, on thesubstrate, and which includes therein a device region; a multilayerconductive stack having a multilayer conductive stack thickness andincluding a barrier layer, on the epitaxial region; and a passivationlayer that extends at least partially on the multilayer conductive stackto define a bonding region on the multilayer conductive stack, thepassivation layer also extending across the multilayer stack thicknessacross the epitaxial region thickness and onto the substrate: whereinthe passivation layer is non-wettable to a bonding material that is usedto attach the bonding region to a submount.
 2. A light emitting deviceaccording to claim 1 wherein the multilayer conductive stack includes amultilayer conductive stack sidewall, wherein the epitaxial regionincludes an epitaxial region sidewall and wherein the passivation layerextends on the multilayer conductive stack sidewall and on the epitaxialregion sidewall.
 3. A light emitting device according to claim 2 furthercomprising a bonding layer on the bonding region.
 4. A light emittingdevice according to claim 1 further comprising an adhesion layer betweenthe multilayer conductive stack and the bonding layer.
 5. A lightemitting device according to claim 4 wherein the adhesion layer includesan adhesion layer sidewall and wherein the passivation layer alsoextends on the adhesion layer sidewall.
 6. A light emitting deviceaccording to claim 4 wherein the adhesion layer includes an adhesionlayer sidewall and wherein the passivation layer does not extend on theadhesion layer sidewall.
 7. A light emitting device according to claim 3wherein the substrate includes a first face adjacent the epitaxialregion and a second face opposite the epitaxial region, wherein thebonding layer has smaller surface area than the multilayer conductivestack, wherein the multilayer conductive stack has smaller surface areathan the epitaxial region and wherein the epitaxial region has smallersurface area than the first face.
 8. A light emitting device accordingto claim 7 wherein the second face has smaller surface area than thefirst face.
 9. A light emitting device according to claim 3 wherein thebonding layer does not extend away from the multilayer conductive stackto beyond the passivation layer.
 10. A light emitting device accordingto claim 1 wherein the bonding layer includes a bonding layer sidewalland wherein the passivation layer does not extend on the bonding layersidewall.
 11. A light emitting device according to claim 1 furthercomprising a submount and a bond between the bonding region and thesubmount.
 12. A light emitting device according to claim 11 wherein thebond is a thermocompression bond.
 13. A light emitting device accordingto claim 11 wherein the bond comprises solder.
 14. A light emittingdevice according to claim 3 wherein the bonding layer extends away fromthe multilayer conductive stack to beyond the passivation layer.
 15. Alight emitting device according to claim 1 wherein the substratecomprises silicon carbide and wherein the epitaxial region comprisesgallium nitride.
 16. A light emitting device according to claim 1wherein the multilayer conductive stack comprises an ohmic layer, areflector layer and the barrier layer.
 17. A light emitting deviceaccording to claim 16 wherein the ohmic layer comprises platinum,palladium, nickel/gold, nickel oxide/gold, nickel oxide/platinum,titanium and/or titanium/gold and wherein the reflector layer comprisesaluminum and/or silver.
 18. A light emitting device according to claim16 wherein the barrier layer comprises tungsten, titanium/tungstenand/or titanium nitride/tungsten.
 19. A light emitting device accordingto claim 18 further comprising a submount and a solder layer between thebarrier layer and the submount.
 20. A light emitting device according toclaim 16 wherein the barrier layer comprises about 95% tungsten andabout 5% titanium.
 21. A light emitting device according to claim 1wherein the barrier layer comprises tungsten, titanium/tungsten and/ortitanium nitride/tungsten.
 22. A light emitting device according toclaim 21 further comprising a submount and a solder layer between thesecond layer comprising nickel and the submount.
 23. A light emittingdevice according to claim 1 wherein the barrier layer comprises about95% tungsten and about 5% titanium.
 24. A light emitting deviceaccording to claim 1 wherein the barrier layer comprises means forreducing migration of contaminants into the multilayer conductive stack.25. A light emitting device according to claim 24 wherein the means forreducing comprises a layer comprising tungsten.
 26. A light emittingdevice comprising: a substrate; an epitaxial region having an epitaxialregion thickness, on the substrate, and which includes therein a deviceregion: a multilayer conductive stack having a multilayer conductivestack thickness and including a barrier layer, on the epitaxial region;and a passivation layer that extends at least partially on themultilayer conductive stack to define a bonding region on the multilayerconductive stack, the passivation layer also extending across themultilayerconductive stack thickness, across the epitaxial regionthickness and onto the substrate; wherein the bonding layer includes abonding layer sidewall and wherein the passivation layer also extends onthe bonding layer sidewall.
 27. A light emitting device comprising: asubstrate; an epitaxial region having an epitaxial region thickness, onthe substrate, and which includes therein a device region; a multilayerconductive stack having a multilayer conductive stack thickness andincluding barrier layer on the epitaxial region; a passivation layerthat extends at least partially on the multilayer conductive stack todefine a bonding region on the multilayer conductive stack, thepassivation layer also extending across the multilayer conductive stackthickness, across the epitaxial region thickness and onto the substrate;a bonding layer on the bonding region; and a solder wetting layerbetween the multilayer conductive stack and the bonding layer.
 28. Alight emitting device according to claim 27 wherein the solder wettinglayer comprises nickel.
 29. A light emitting device comprising: asubstrate; an epitaxial region having an epitaxial region thickness, onthe substrate, and which includes therein a device region; a multilayerconductive stack having a multilayer conductive stack thickness andincluding a barrier layer, on the epitaxial region; and passivationlayer that extends at least partially on the multilayer conductive stackto define a bonding region on the multilayer conductive stack, thepassivation layer also extending across the multilayer conductive stackthickness, across the epitaxial region thickness and onto the substrate;wherein the multilayer conductive stack comprises an ohmic layer, areflector layer and the barrier layer; and wherein the barrier layercomprises a first layer comprising tungsten and a second layercomprising nickel.
 30. A light emitting device according to claim 29wherein the first layer comprises titanium/tungsten.
 31. A lightemitting device according to claim 29 further comprising a submount andlayer between the second layer comprising nickel and the submount.
 32. Alight emitting device comprising: a substrate; an epitaxial regionhaving an epitaxial region thickness, on the substrate, and whichincludes therein a device region; a multilayer conductive stack having amultilayer conductive stack thickness and including a barrier layer, onthe epitaxial region; and passivation layer that extends at leastpartially on the multilayer conductive stack to define a bonding regionon the multilayer conductive stack, the passivation layer also extendingacross the multilayer conductive stack thickness, across the epitaxialregion thickness and onto the substrate; wherein the barrier layercomprises a first layer comprising tungsten and a second layercomprising nickel.
 33. A light emitting device according to claim 32wherein comprising a submount and a solder layer between the barrierlayer and the submount.
 34. A light emitting device according to claim32 further comprising a submount and a solder layer between the secondlayer comprising nickel and the submount.
 35. A light emitting devicecomprising: a substrate; an epitaxial region having an epitaxial regionthickness, on the substrate, and which includes therein a device region;a multilayer conductive stack having a multilayer conductive stackthickness and including a barrier layer, on the epitaxial region; andpassivation layer that extends at least partially on the multilayerconductive stack to define a bonding region on the multilayer conductivestack, the passivation layer also extending across the multilayerconductive stack thickness, across the epitaxial region thickness andonto the substrate; a bonding layer on the bonding region; and a shearstrength enhancing layer between the multilayer conductive stack and thebonding layer.
 36. A light emitting device according to claim 35 whereinthe shear strength enhancing layer comprises nickel.
 37. A lightemitting device comprising: a substrate; an epitaxial region having anepitaxial region thickness, on the substrate, and which includes thereina device region; a multilayer conductive stack having a multilayerconductive stack thickness and including a barrier layer, on theepitaxial region; and passivation layer that extends at least partiallyon the multilayer conductive stack to define a bonding region on themultilayer conductive stack, the passivation layer also extending acrossthe multilayer conductive stack thickness, across the epitaxial regionthickness and onto the substrate; wherein the multilayer conductivestack comprises: an ohmic layer on the epitaxial region opposite thesubstrate; a reflector layer on the ohmic layer opposite the epitaxialregion; the barrier layer on the reflector layer opposite the ohmiclayer; an adhesion layer on the barrier layer opposite the reflectorlayer; and a bonding layer on the adhesion layer opposite the barrierlayer.
 38. A light emitting device according to claim 37 furthercomprising a submount and a bond between the bonding layer and thesubmount.
 39. A light emitting device according to claim 38 wherein thebond is a thermacompression bond.
 40. A light omitting device accordingto claim 38 wherein the bond comprises solder.
 41. A light emittingdevice according to claim 40 wherein the solder comprises tin and/orgold.
 42. A light emitting device according to claim 40 wherein thesolder has a reflow temperature of less than about 210° C. and whereinthe barrier layer comprises a layer of titanium/tungsten that is betweenabout 500 Å thick and about 50,000 Å thick.
 43. A light emitting deviceaccording to claim 40 wherein the solder has a reflow temperature ofmore than about 210° C. and wherein the barrier layer comprises a firstlayer of titanium/tungsten that is about 5000 Å thick and a second layercomprising nickel that is about 2000 Å thick, on the first layer.
 44. Alight emitting device according to claim 40 wherein the solder has areflow temperature of more than about 250° C. and wherein the barrierlayer comprises a first layer of titanium/tungsten that is about 5000 Åthick and a second layer comprising nickel that is about 2000 Å thick,on the first layer.
 45. A light emitting device according to claim 37wherein the substrate comprises silicon carbide and wherein theepitaxial region comprises gallium nitride.
 46. A light emitting deviceaccording to claim 37 wherein the ohmic layer comprises platinum,palladium, nickel/gold, nickel oxide/gold, nickel oxide/platinum,titanium and/or titanium/gold and wherein the reflector layer comprisesaluminum and/or silver.
 47. A light emitting device according to claim37 wherein the barrier layer comprises titanium, titanium/tungstenand/or titanium nitride/tungsten.
 48. A light emitting device accordingto claim 37 wherein the barrier layer comprises about 95% tungsten andabout 5% titanium.
 49. A light emitting device according to claim 37wherein the barrier layer comprises a first layer comprising tungstenand a second layer comprising nickel.
 50. A light emitting deviceaccording to claim 49 wherein the first layer comprisestitanium/tungsten.
 51. A light emitting device according to claim 37wherein the epitaxial region has smaller surface area than the firstface, wherein the barrier layer, the reflector layer and the ohmic layerhave same surface area that is less than that of the epitaxial regionand wherein the adhesion layer and the bonding layer have same surfacearea that is less than that of the barrier layer, the reflector layerand the ohmic layer.
 52. A light emitting device according to claim 51wherein the epitaxial region, the ohmic layer, the reflector layer, thebarrier layer, the adhesion layer and the bonding layer each include asidewall, the light emitting device further comprising a passivationlayer on the sidewall of the epitaxial region, the ohmic layer, thereflector layer, the barrier layer, the adhesion layer and the bondinglayer.
 53. A light emitting device according to claim 52 wherein thepassivation layer also is on the first face of the substrate.
 54. Alight emitting device according to claim 52 further comprising asubmount and a solder layer between the bonding layer and the submount,wherein the passivation layer is non-wettable to the solder layer.
 55. Alight emitting device according to claim 37 wherein the epitaxialregion, the ohmic layer, the reflector layer, the barrier layer, theadhesion layer and the bonding layer each include a sidewall, the lightemitting device further comprising a pessivation layer on the sidewallsof the epitaxial region, the ohmic layer, the reflector layer, thebarrier layer, the adhesion layer and the bonding layer.
 56. A lightemitting device according to claim 37 further comprising a solderwetting layer between the adhesion layer and the bonding layer.
 57. Alight emitting device according to claim 37 further comprising a shearstrength enhancing layer between the adhesion layer and the bondinglayer.